. www.perkinelmer.com/opto hsh2001nieo lamps for photolithography datasheet lighting imaging telecom mercury short arc lamps applications ? microlithography description perkinelmer optoelectronics is a leading manufacturer of mercury short arc lamps ranging in output power from 1000 to 8000 watts. these lamps are used in the production of printed circuit boards, liquid crystal displays and semiconductors. the hsh series lamps are used worldwide in microlithography systems manufactured by asml, canon, gca, nikon, karl suss, ultratech stepper, and svg. with extremely high stability, uniform output distribution and extended lamp lifetimes, the hsh series has become the lamp choice of many of the world?s leading semiconductor manufacturers. perkinelmer has been a leading manufac- turer of high intensity arc lamps for more than 30 years and is a premier lamp sup- plier for solid state lasers, medical equip- ment, nasa space systems and microlithography. perkinelmer has steadily advanced lamp performance from 1000 watts to 8000 watts. with the intro- duction of new materials and proprietary manufacturing processes, we have extend- ed lamp lifetimes from several hundred hours to more than two thousand hours. the hsh series provides longer lifetimes, outstanding uniformity, and excellent spectral quality which results in increased throughput, reduced downtime and an overall reduction in the cost of ownership.
nikon nsr-2005 (i9, i10) nsr-2205 i11 SUV-2001NIL hbo2001w/nil perkinelmer welcomes inquiries about special lamps. we would be pleased to discuss the requirements of your application and th e feasibility of designing a lamp specifically suited to your needs. for more information e-mail us at opto@perkinelmer.com or visit our web site at www.perkinelmer.com/opto. all values are nominal; specifications subject to change without notice. ? 2000 perkinelmer inc. all rights reserved. . www.perkinelmer.com/opto usa: perkinelmer optoelectronics 44370 christy st. fremont, ca 94538 phone: (510) 979-6500 fax: (510) 687-1140 europe: perkinelmer optoelectronics gmbh wenzel-jaksch-str. 31 65199 wiesbaden germany phone: +49 611 492 0 fax: +49 611 492 177 asia: perkinelmer optoelectronics 47 ayer rajah crescent #06-12 singapore 139947 phone: +65 775 2022 fax: +65 775 1008 description power current voltage current ripple temperature (at base) lifetime nominal 1750 watts 67 amps (dc) 26 volts (dc) 3% 220oc (max) 2250 hours range 60-76 amps (dc) 23-29 volts (dc) operational specifications hsh2001nieo physical specifications description arc gap anode base cathode base specification 4.5 mm (max) 27 mm dia (m10-p1.5) 27 mm dia and cable typical performance graph notes 1. lamp must be operated with cathode end up and anode end down. inclination of lamp axis to vertical must not exceed 10o. dimensions spectral output anode (+) end down cathode (-) end up part number references used in replaces hours of operation relative intensity (%) wavelength (nm) relative intensity (%) all dimensions are in millimeters. 0 10 20 30 40 50 60 70 80 90 100 250 300 350 400 450 500 550 600 650 700 750 100 90 80 70 60 50 40 30 20 10 0 0 450 900 1350 1800 2250 252 2 5 2 max m a x 233.0 2 3 3 . 0 ? 55 5 5 max m a x ds-188 rev b 1101
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